Materials science
Beam Technologies for Integrated Processing
by Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council
Description
Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.
This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
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http://www.nap.edu/2006
National Academies Press
The National Academies Press (NAP) publish the reports of the National Academies of Sciences, Engineering and Medicine. They published more than 200 books a year on a wide range of topics.
View all titlesBibliographic Information
- Publisher National Academies Press
- Publication Date February 1992
- Orginal LanguageEnglish
- ISBN/Identifier 9780309046350
- Publication Country or regionUnited States
- FormatPaperback
- Primary Price 19 USD
- Pages106
- ReadershipProfessional and scholarly
- Publish StatusPublished
- Dimensions11 x 8.5 inches
- Biblio NotesRelated Digital edition - 9780309583954 . Copyright year 1992.
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